Mechanical Engineering
ME 6260: Introduction to Microelectromechanical Systems (MEMS)
Lecture - 4 credits
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- Provides an introduction to microelectromechanical systems including principles of sensing and actuation, microfabrication technology for MEMS, noise concepts, and packaging techniques.
- Covers a wide range of disciplines, from electronics to mechanics, material properties, microfabrication technology, electromagnetics, and optics.
- Studies several classes of devices including inertial measurement devices, pressure sensors, rf components, and optical MEMS.
- Devotes the last third of the semester largely to design projects, involving design of MEMS devices to specifications in a realistic fabrication process.
Provides an introduction to microelectromechanical systems including principles of sensing and actuation, microfabrication technology for MEMS, noise concepts, and packaging techniques. Show more.